Reflective Silicon Arrayed Waveguide Grating using One-Dimensional Photonic Crystal reflector

We report silicon arrayed waveguide grating with reflective fan-out geometry using one-dimensional photonic crystal as reflector. Wide reflection spectral range is possible with this reflector. The wavelength characteristics are obtained by fabricated device using immersion ArF lithography. We also report a device using parallel waveguide array geometry to minimize the occupational area of the device.