A 6-bit CMOS Passive Phase Shifter for X-Band Phased Arrays

This paper introduces a 8.5-10.5GHz 6-bit passive phase shifter implemented in 0.13um CMOS technology. The topology of phase shifter is carefully investigated to obtain better performance. The high-pass/low-pass topology is adopted in 90o and 180o phase shifting block for better phase flatness. The switched LC type network is used in other blocks to reduce the insertion loss. The chip size is 2.2mm*1.6mm (3.52mm
²
). The overall root mean square (RMS) is less than 4°. The insertion loss of reference state is less than -14dB, input and output return losses at reference state are 14 and 13.8 dB in the worst case, respectively.