Inductance investigation of single layer and multilayer YBa2Cu3O7-δ thin films grown by reactive coevaporation

The performance of Josephson based devices strongly depend on the inductance properties associated with the material and circuit design. Here we compare the inductance of YBa
₂
Cu
₃
O
_7-δ
films with and without superconducting ground planes grown by reactive coevaporation. Specifically, we fabricated several superconducting quantum interference devices from single and multi-layer films with different geometries using a focused helium ion beam. Measurements of device electrical transport properties were analyzed to experimentally determine the sheet inductance. Additionally, measurements of the temperature dependence of the inductance was used to separate the contributions from geometric and kinetic inductance. We find that the presence of the ground plane in the multi-layer structure reduces the contribution of geometric inductance with no detectable change in the kinetic inductance.