Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope

A novel approach to detect the crystal defects extended along particular orientation using differential phase contrast (DPC) images with segmented type detector for wide range of devices and materials in scanning transmission electron microscope (STEM) is provided. In addition, the signals from different segments could be further processed to enhance the contrast of light elements specifically, which also called enhanced annular bright field (eABF) mode in segmented annular all field (SAAF) system.