Advanced 3D Optical Imaging for Die Surface Topographic Analysis

We live in, move through, and see in a world of three dimensions (3D). The 3D visual observation of the milieu around us is based on 2D images projected onto our retina. The 3D stereoscopic capability renders spatial information and enables us to gain valuable physical evidences hidden in the z-axis. In this paper, we discuss the application of 3D optical microscopy imaging aided with advanced software features for enhancing the quality of die surface failure analysis. A total of five case studies analyzed with various failure analysis techniques are presented.