Ultra-thin polymer spray coating for advanced adhesive bonding applications

Adhesive bonding using an ultra-thin polymer layer is getting more attention for more than Moore applications. However some challenges of ultra-thin layer coating remain and are subject to further research. For this purpose diluted BCB adhesive layers were evaluated to create bonding layers down to 30 nm adhesive thickness. BCB is a well-known and thus favourable candidate for this evaluation due to it's physical properties, such as low curing temperature, high degree of planarization, high optical clarity, along with good compatibility with various metallization systems.