Flexible CMUT for Vibrating Mesh Nebulize

This work is a feasibility study aiming to demonstrate that CMUT technology could be used as an actuator source for vibrating mesh nebulizer. Ring shape PZT materials are commonly used in commercial products but they suffer from technological limitations (for example significant self-heating) that could be overcome by CMUT technology. This paper shows experimental results obtained from a first prototype realized with a linear array. A thin disk membrane was locally etched below few elements, on the rear face of the Si substrate. It is demonstrated that the excitation of the CMUT elements, at low frequencies (in the kHz frequency range), enables the thin membrane actuation, in air and in water. Significant displacement (≈1 μm) were observed for the first and the second resonance mode of the membrane.