Full 3D FEM Analysis of Scattering at a Border Between IDT and Reflector in SAW Resonators

This paper describes 3D FEM simulation of scattering at a border between IDT and reflector in SAW resonators using hierarchical cascading technique and general purpose graphic processing unit. SH-type SAW on the 42°YX-LiTaO
₃
substrate is chosen. It is shown how the reflector design affects the scattering loss at the border. It is also shown that scattering fields can be observed selectively by the use of the wavenumber domain analysis.