Nano-particle mass sensing using phononic pillars

In this work, we investigate the sensitivity of a pillar based metasurface in order to understand the behavior of the system in real tests conditions where the mass perturbation will not be homogeneous on all the system. The structure we study is composed in stacking alternate layers of Silica and Tungsten and presents a torsional resonant mode which presents a high quality factor and a high mass sensitivity, in a case of a homogeneous perturbation. In a case of a non-homogeneous mass-perturbation over the pillars, each pillar gives a contribution to the signal perturbation under the form of a shifted peak. These results show that each pillar gives a contribution to the output signal and that the high quality factor of the structure allows to distinguishing the different perturbations.