Trajectory Error Eliminates of Input Shaping on X-Y Platform by Phase Erro Feedforward Control

In this paper, the servo system mechanical drive is analyzed, flexible beam vibration will cause end point trajectory distortion. Simplify the flexible beam load as a second-order system, which is a low frequency light damped vibration system, the ZVD input shaper which is very suitable for vibration suppression of low frequency light damping system is adopted. Due to the different vibration frequencies and damping coefficients of the X-Y platform flexible load, the X-axis and Y-axis input shapers cause different command lags, which can cause trajectory distortion. The adaptive feedforward controller based on phase angle error is used to solve trajectory distortion problem. Combined with the input shaper and adaptive feedforward control based on phase error, it can solve the vibration suppression of X-axis and Y-axis flexible load with different vibration characteristics, and can guarantee the track accuracy. Finally, the effectiveness of the algorithms is verified by simulation.