Electrode Shape Optimization of Electrostatic Chuck for Uniform Force Distribution using Continuum Sensitivity Analysis

This paper proposes electrostatic chuck electrode design method for uniform chucking force distribution. To design the chuck, we combine continuum sensitivity analysis and adaptive level set method. Continuum sensitivity analysis derives the sensitivity at the electrode surface, and adaptive level set method clearly demonstrates the changed shape. The design objective is to obtain uniform force in each segment of the wafer, which is calculated using virtual work method. To show the feasibility of the design method, this paper designs coulomb type bipolar electrostatic chuck with two electrodes.