Rotor-dynamic Analysis for Magnetic Turbomolecular Pump Rotor with Different Assembly Relations

Modal analysis is an important part of magnetic suspended high-speed motor design. In this paper, a rotor-dynamic analysis is proposed for a turbomolecular pump rotor assembly supported by magnetic bearings using the transfer matrix method. First, the rotor assembly is simplified by the equivalent model. Then, the transfer matrix model is established and assembly coefficients are introduced to reflect the influence of different assembly relations. Next, the assembly coefficients are optimized. Finite element method and modal test are conducted to verify the accuracy of this method. Finally, the stiffness of magnetic bearings are brought into the optimized model to search the relationship between the support coefficients and rotor-dynamic peculiarity.