Effects of External Parameters on Formation of Nanoparticles in Argon-Acetylene Plasma

The densities of C
₂
H
₂
and C
₄
H
₂
molecules, C
₂
H radicals, C
₂
H
^-
anions and electrons in an argon-acetylene plasma, which are responsible for the formation of carbonaceous nanoparticles in the plasma, as functions of the shape of electron energy distribution function, the electron density and the nanoparticle size and density are studied numerically using a volume-averaged model. Analyzing the dependencies, the conditions suitable for production of the nanoparticles are determined. In particular, it is found that low-density plasmas where electrons have the Druyvesteyn energy distribution are more favorable for the production of nanoparticles than high-density plasmas with the Maxwellian distribution for electrons. The production of nanoparticles in the case of plasma with large density and radius of nanoparticles is not intensive because of small density of C
₂
H
^-
anions. These conclusions are in a good agreement with experimental measurements.