Size Separation Method of Microparticles Based on Vibration-Induced Flow

In this study, we propose size separation method of microparticles based on vibration-induced flow. Vibration-induced flow is localized flow around micropillar when vibration is applied to the micropillar. By patterning micropillar array with square grid and varying distances of the micropillars, we can realize size separation of microparticles. We demonstrated separation of microparticles of 5 and 20 μm. Success rate of the separation was approximately 90 %.