Characterization of Smooth Dielectric Samples with Highly Focused Gaussian Beams in a Scatterometer

This paper describes a numerical validation of the transmission coefficient of a smooth dielectric sample recently measured at ESA-ESTEC during the integration testing of a scatterometer operating in 50-750 GHz frequency range. The aim of the paper is to compare the experimental results of a calibrated measurement with a numerical model in GRASP and describe a numerical method for extracting material parameters.