Ethylene glycol assisted hydrothermal synthesis of molybdenum disulfide for MEMS humidity sensor

In this paper, we have realized the ethylene glycol assisted hydrothermal synthesis of molybdenum disulfide (MoS
₂
) with tunable oxygen doping by the adjustment of reaction temperature and applied in humidity sensing with enhanced performance. The addition of ethylene glycol (EG) results in a small flake size and rich oxygen doping site in MoS
₂
. This defect-rich structure brings benefits to the humidity sensing property. The influence of temperature is also studied and the proper temperature for the synthesis turns out to be 200 °C.