Silicon Microcavity in the Visible Range Enabled by Curved Slotted Micromirrors

Optical micro cavities have become an essential building block for diverse on-chip and off-chip systems including medical imaging, spectroscopy, silicon photonics and cavity quantum electrodynamic. Most of the technologies presented in literature impose limitations on the cavity bandwidth of operation. The need for an ultra-wide band operation, spanning from the visible range to the infrared range (IR), as well as reliable spectral performance has motivated the development of microcavities using deeply-etched slotted mirror.