Ultra-Fast Laser Printing of IR-Resonant Plasmonic Metasurfaces

We report on ultra-fast fabrication of patterned plasmonic metasurfaces, suitable for production of high-quality resonances in near-infra-red and mid-infra-red range. Fabrication is realised using direct laser printing with 200 fs pulses at 515 nm, tightly focused onto a 50-100 nm gold surface over a glass substrate (Fig. 1 a). By demultiplexing the beam into linear arrays and using a high repetition rate, up to ten million structural features per second have been printed. Depending on the energy of the pulse (Fig. 1 b), it was possible to produce a range of structural features, from smooth nano-bumps at lower energies, to protruded nano-jets with up to 900 nm height, and then over ablation regime, micro-holes of about 1 μ m diameter (Fig. 1 a). All these structures have been produced in the form of periodic arrays (Fig. 1 c) with the periods from 1 to several μ m.