X-CHIP-03: SOI MAPS radiation sensor with hit-counting and ADC mode

This work presents a novel MAPS sensor X-CHIP-03 developed for soft X-ray radiation imaging and advanced dosimetry. X-CHIP-03 was fabricated in a 180 nm SOI CMOS technology. The presented sensor contains a matrix of 64 × 64 pixels with 60 μm pixel pitch. Advantage of this technology is possibility to integrate complex electronics in the pixels while preserving 100% fill factor for radiation detection. Novel feature of this SOI MAPS sensor is capability to operate the sensor in the hit-counting mode or in the ADC mode. The hit counting mode is primarily designed for radiation imaging and the ADC mode is intended for measurement of energy deposited in each pixel. The effective (linear) dynamic range is from 5 keV to 20 keV of the energy deposited in the sensitive layer. The first measurement results are presented.