Effect of growth variables on properties of gallium oxide thin films grown by sputtering

The development of high-quality beta gallium oxide thin film is essential for successful application. We investigated effects of growth variables on gallium oxide thin films by RF magnetron sputtering. The results showed that high quality beta gallium oxide thin films are formed at high temperature but the quality degrades at the low temperature. Effects of growth variables such as growth temperature, power and gas composition will be discussed in detail during the presentation.