Optimization of Nonlinear Optical Properties of Tellurium-Oxide-Coated Silicon Nitride Waveguides

We propose designs of silicon nitride (Si
₃
N
₄
) waveguides with optimized nonlinear parameter by addition of tellurium oxide (TeO
₂
) top-cladding layers of various thicknesses. The proposed waveguides have calculated nonlinear parameters of up to five times that of stoichiometric Si
₃
N
₄
and exhibit anomalous group velocity dispersion at near infrared wavelength.