Characterization of Heated Ion Implantation for non Amorphizing Conditions and Correlation with Kinetic Monte Carlo Simulations

In this work, heated implantation impact on defect generation is observed for non-amorphizing conditions and specific anneal. Photoluminescence imaging method has been used and exhibits radiative defect density variation with chuck temperature. Moreover, to understand the behavior of such implantation in terms of defect generation and depth profile, effectiveness of Kinetic Monte Carlo (KMC) simulations is discussed.