Aqueous Media Electrostatic MEMS Sensors

We report a novel electrostatic MEMS sensor to detect solutes in aqueous media. This is the first demonstration of an electrostatic sensor in aqueous media. The sensor is excited electrostatically and its response is measured capacitively. It is equipped with a polymeric sensing material to sorb mercury acetate dissolved in water. It measures the concentration of mercury acetate in water as a shift in resonance frequency. The sensor functionality was demonstrated by comparing its response to a solution of 100 ppm mercury acetate in deionized water and a control fluid of deionized water only.