A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks

This paper reports the design, fabrication and evaluation of a reflection-type micro Rb vapor cell fabricated by local anodic bonding of small 45° mirrors. The 45° mirrors with a Bragg reflector are fabricated by using dicing process. The vapor cells having a horizontal cavity with the 45° mirrors at the both ends are fabricated by anodic bonding process. Optical absorption of Rb and CPT (Coherent Population Trapping) resonance for atomic clock operation are evaluated.