Genetic Algorithm for the Design of Freeform Geometries in a MEMS Accelerometer Comprising a Mechanical Motion Pre-Amplifier

This paper describes a novel, semi-automated design methodology based on a genetic algorithm using freeform geometries for micro-electro-mechanical systems (MEMS) devices. The use of freeform geometries allows higher degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show a figure of merit (defined as the product of sensitivity and bandwidth frequency) improvement by 100% and a sensitivity improvement by 141% compared to a device designed by a conventional way.