High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators

This paper presents a self-deformable varifocal MEMS mirror for a focus-tunable MEMS scanner. Piezoelectric actuator was monolithically integrated on a 4 mm-diameter mirror, and its focus changed from -120 mm to +140 mm according to the applied DC voltage. The maximum optical scanning angle of the proposed scanner was 26.2°, which meets the demands of high-resolution laser scanning applications.