A CMOS Hall-based Magnetic Multisensor System Free from Parasitic Effects of Temperature and Package Stress

This paper presents a novel approach of cross-sensitivity compensation in a fully integrated CMOS Hall magnetic multisensor system. Parasitic changes of the magnetic sensitivity due to temperature change and package stress as well as their cross-combination are effectively compensated in a single step in the digital domain combining signals from Hall, temperature, and stress sensors. Over a full load profile of temperature cycles between -40 °C and 125 °C, humid-to-dry packages, and external forces up to 30 N we achieved the stabilization of the magnetic sensitivity to 1±0.004.