Development of a Multi Channel Piezoelectric Flexural Plate Wave Biomems-Sensor for Rapid Point-of-Care Diagnostics

The Respiratory Syncytial Virus (RSV) is responsible for a high rate of post-neonatal deaths. An early diagnosis with accurate detection and forecast of disease outcome is vital for an effective treatment. Common diagnostics for the identification of unknown pathogens require large sample volumes and are laborious. In this work, a piezoelectric flexural plate wave (FPW) Bio-MEMS sensor utilizing multi resonating membranes was developed. The detection is based on the frequency shift of each membrane due to binding of an additional mass depending on functionalization treatment. The experimental results show a resolution of up to 14 Hz/nM RSV chemokines in complex media.