Integrated Resonant Dual-Microcantilevers Combined Sensor with Accurate Identification and Highly-Sensitive Detection to H2S Gas

This paper shows a novel integrated resonant dual-microcantilevers combined gas sensor which can identify and detect trace-level H
2
S. With two kinds of specially designed sensing materials loaded respectively, one cantilever can identify H
2
S by outputting positive frequency shift signals, while the other cantilever will detect H
2
S as a normally used cantilever sensor with negative frequency shifts. Experiments show that the sensor can distinguish H
2
S from a variety of common gases, and the detection limit to H
2
S is as sensitive as a few ppb.