Research of Diaphragm Type Resistive Sensor built-in Waveguide for High Power Microwave Pulse Measurement

In this paper, the structural model of diaphragm type resistive sensor (RS) built-in waveguide for high power microwave (HPM) was studied. The basic principle of the RS for the measurement of HPM pulse was mainly introduced. The structure and process flow of the diaphragm type RS was analyzed. In view of problems such as weld shedding and unsatisfactory ohmic effects during the manufacture of the RS, the metallization scheme of the RS has been improved. The layered alloy sputtering process has been used to rework the RS, which solves the problems of rough contact surface, high ohmic contact resistance and low device yield in the ohmic contact formed by a single layer of metallic Nickel. A sample of diaphragm type RS was developed and its surface structure was observed by the scanning electronic microscope (SEM). Experiments about the detected voltage output of the RS were carried out. The detected voltage output of the RS under different pulse widths and input powers was given. Results show that the proposed diaphragm type RS can work well and the experimental data have a high consistency.