Effect of Ammonium sulfate and H2O2 on Cobalt Contact bulk Chemical Mechanical Polishing

In this paper, we investigated the effect of ammonium sulfate on cobalt contact chemical mechanical polishing (CMP) in hydrogen peroxide based slurry. It revealed that the ammonium sulfate can significantly improve the cobalt removal rate (RR). The Tafel plots corrosion current density is significantly increased to 210μA/cm
²
that proved further accelerates the dissolution corrosion rate.