Design of a MEMS Electrostatic Kinetic Energy Harvester and its Bennet Conditioning Circuit in Integrated Technologies

This abstract presents the design of a MEMS vibration energy harvester and its conditioning circuit intended to be fully fabricated using commercial integrated processes. The system includes an electrostatic transducer for the energy conversion and a Bennet’s doubler conditioning circuit. The MEMS is designed in the technology (XMB10) and the integrated circuit (IC) in the technology 350 nm High Voltage (XH035), both from XFab, using the new Coventor/Cadence environment. For design validation of the system, the complete layout of the system has been simulated, including the electromechanical device, the parasitic components of the IC and the bonding pads. We successfully generated an average power of 195 nW on an integrate storage capacitance of 1 nF under a voltage of 9 V for an external mechanical excitation of 3 g at 431 Hz.