Investigation of Semiconductor Nanomembrane with the Nanocavity Structure for Optoelectronic Devices

A nanomembrane with optical nanocavity structure was investigated employing finite difference time domain method in this paper. The nanomembrane with a typical thickness less than a few hundred nanometers can promote optical absorption sharply by introducing nanocavity structure. Geometrical parameters of the structure have a profound impact on the optical absorption of nanomembrane, which was studied in this paper. It was found that the nanocavity structure can enhance the absorption of visible light with different wavelengths by adjusting the thickness of different layers.