Study of the Thermal Treatment in Growth and Annealing Processes of Nano-thin Films

The thermal treatment plays a key role in the growth and annealing process of nano-thin films. In this article, computer simulation is used to study this process at atomic-level. It has been shown that the relationship of the potential barrier of moving condense atom and thermal noise will determine the moving direction of this atom and structure of thin films at the end. The thermal treatment methods to get high quality of thin films have been recommended by the results of this study.