A CMOS Proximity Capacitance Image Sensor with $16\mu \mathrm{m}$ Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames Per Second

A 16μm pixel pitch 60 frames per second CMOS proximity capacitance image sensor fabricated by a 0.18μm CMOS process technology is presented. By the introduction of noise cancelling operation, both fixed pattern noise and kTC noise are significantly reduced, resulting in the 0.1aF (10
^-19
F) detection accuracy. Proximity capacitance imaging results using the developed sensor are also demonstrated.