In-Phase Error Self-Calibration For Silicon Microgyroscopes

The in-phase error caused by misalignment of comb fingers leads to bias drift of silicon microgyroscopes which is also susceptible to stress. By periodically making the drive loop close and open and sampling the sense mode output while it's open, the in-phase error term can be canceled. The calibrated bias of gyro is greatly improved and is no longer susceptible to stress. This method is also applicable to silicon accelerometer and provides a solution for enhancing the long-term stability of MEMS inertial devices.