Experimental Study of a Dual-Mode Control MEMS Wind Sensor with High Accuracy

This paper describes a dual-mode control two-dimensional (2D) MEMS wind sensor with high accuracy. The primary aim is to improve the performance of the wind sensor at the full measurement range. The sensor consists of eight platinum resistors, which can be used as either heating resistors or thermistors in different modes. The novel sensor combines the advantages of constant voltage (CV) mode and temperature-balanced (TB) mode. It applies different control mode at different wind speed for a high measurement accuracy. Based on this control principle, the sensor shows a measurement error less than ±0.3m/s for the wind speed up to 33m/s while the measured direction spans from 0° to 360° has an error less than ±2°.