Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides

In this paper, we reported the design, fabrication and preliminary measurements of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach- Zehnder interferometer (MZI) modulator based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration includes an optical MZI, a DC electrode, two phase electrodes, a U-electrode and an I-electrode. It was fabricated by standard photolithography, ICP dry etching, electroplating and etc. Measurement results show that the EO modulator has a propagation loss of about 9.4 dB/cm and an electric bandwidth of larger than 40 GHz.