State Trajectory Generation of MIMO Multirate Feedforward for Perfect Tracking Control in High-Precision Stage

Multirate feedforward control is widely used for the control of precise systems such as the high-precision stages and the hard disk drives. In the multirate feedforward control, it is possible to obtain a control input that achieves perfect tracking for the state trajectory. Therefore, it is necessary to generate a state trajectory corresponding to the output trajectory in advance. In this paper, the authors propose a state trajectory generation from an output trajectory for a multi-input multi-output system using singular value decomposition. The effectiveness of this method is verified through simulation and experiments.