Design of High Precision Capacitance Displacement Sensor

This paper designs a capacitive displacement sensor with small size, high accuracy and good stability. Firstly, the single pole variable distance capacitance displacement measurement method used in the sensor is theoretically analyzed; then, the sensor's probe structure is designed in detail, and the related capacitance value detection and processing circuit of the sensor is completed, and the data is processed through the upper computer program. Finally, the capacitive displacement sensor was calibrated. The experimental results show that the measuring range of the sensor is 10 ~ 100μm, the linearity is better than 0.2%, the resolution of the sensor is 0.21μm, and the repeatability of the sensor is about 0.15μm.