I. Introduction
Permanent magnet linear synchronous motor(PMLSM) has the advantage of simple structure, high efficiency, high power density, and high reliability. Over the years, PMLSM has been widely used in space field, medical field, semiconductor manufacturing field and so on. And these fields are very demanding on the accuracy and the response speed of PMLSM. So, increasing the speed accuracy and the response speed are of great importance. PI controller is a commonly used method because it has strong robustness and is easy to design, but PMLSM is a nonlinear and strong coupling system, so sometimes it cannot meet the requirements of high performance control [1].