Generation of a Millisecond Range Low-Energy Electron Beam by a Forevacuum Plasma Electron Source Based on Cathodic Arc

The research of generation of the millisecond range (1-10 ms) large-radius low-energy (up to 10-11 keV) electron beam in the forevacuum pressure range (3-20 Pa) is presented. To produce such electron beam a plasma cathode electron source based on cathodic arc was used. To increase efficiency of the electron emission, the anode of the source has been divided into hollow and plane parts, and current through the hollow part has been limited. The current-voltage characteristic of the plasma source of the millisecond electron beam is typical for the plasma-cathode electron sources. Working gas and its pressure affect on the arc discharge burning voltage and on electron emission from the arc plasma. The electron beam with pulse duration up to 10 ms and emission current up to 24.5 A (beam current up to 19 A) is obtained in the forevacuum pressure range. The reached parameters of the electron beam allow implementing the surface treatment of various materials.