Introduction
For ADCs in the field of industrial robots, low latency, high dynamic range (DR) (> 90 dB) and wide bandwidth (> 0.5 MHz) are required for the feedback control. However, it is difficult to realize high DR by using SAR ADCs due to the capacitor mismatch. Although incremental ADCs (IADCs) have inherently high linearity, the requirement of a high oversampling ratio to obtain a high resolution limits the bandwidth in a first order modulator. A higher order modulator was proposed [1], but this architecture suffered from potential instability and from more power consumption. To solve these problems, multi-step IADCs with extended counting were proposed [2]–[4]. However by using a SAR ADC as extended counting [2], the size of the CDAC increased and the second order modulator was required for high DR to reduce the effect of the capacitor mismatch. By using a cyclic ADC [3], the required multiplications by a factor of 2 limited the achievable accuracy. A multi-slope scheme in [4] realized high DR of 99.7 dB, but it required many conversion cycles.