Development of micro focus X-ray microscope equipped with high brightness Li/W < 111 > field emitter

We developed a low acceleration voltage X-ray microscope with a Li/W <; 111 > emitter. The Li/W <; 111 > emitter with Taylor cone has high angler current density and high total emission. An electron beam from emitter was focused by an electrostatic lens of two electrodes and an objective magnetic lens. At an acceleration voltage of 12 kV, X-ray intensity and spatial resolution of X-ray images were 10 μ Gy/min and better than 10 μ m, respectively. The spatial resolution is limited by the electron probe size on a target for X-ray excitation.