Measurement Uncertainty Analysis for On-Wafer TRL Calibration Using Precision RF Probing Technique

The paper demonstrates measurement uncertainty analysis in on-wafer measurement with detail discussion of probe tilt and stage rotation. Since ours measurement system can realize repeatable determination of probe position in X-, Y-, and Z-axes, influences of probe tilt and stage rotation can be evaluated with the system avoiding influences regard to variations in probe coordinates. Uncertainty-analysis algorithm was constructed for the analysis of each uncertainty contributor in case of conventional manual probing and precision probing technique. Consequently, measurement uncertainty with the precision probing technique was a half of conventional manual probing technique.