Microelectromechanical System (MEMS) Resonator: A New Element in Power Converter Circuits Featuring Reduced EMI

This paper presents a new passive device, which could be successfully used in switching power converters to replace inductors, and capacitors. Microelectromechanical System (MEMS) resonators are traditionally used in phase locked loop (PLL) based digital clock circuits, but could be effectively used for power conversion. The major advantage of MEMs resonators is the non-magnetic energy storage with inductor-like properties. Moreover, they could be fabricated in today's conventional silicon process without requiring any major modifications. This integration makes it a very attractive choice for implantable circuits where inductor-free design is a major criterion. MEMs resonators can be used as inductors or capacitors by changing the switching frequency, and they are not impacted by strong magnetic or electric fields, therefore making them safe, and compact for MRI friendly implantable circuits. In addition, this resonator based circuits produce substantially less electro-magnetic interference (EMI) because inductors are not used in the circuit. This paper describes the various features of this new device, applications in resonant power converters, and future uses especially biomedical applications of MEMs resonators.