Study on the Analytical Solution of Electron Number Density and Impedance of α Mode Helium Radio-Frequency Atmospheric Pressure Glow Discharges

Compared to direct current and low frequency discharges, radio frequency atmospheric pressure glow discharge (RF APGD) has many advantages, such as high power density, low maintaining voltage, high chemical activity and large area plasma, which enables RF APGD to have a wider range of applicable prospects in industry. Due to atmospheric pressure environment and high frequency of discharge, past method are not suitable for measuring RF AP-GD parameters such as electron number density and thickness of sheath. Therefore, most people use numerical simulation to study its characteristics.