Research of Suppressing Electrical Feed-Through for Resonant Ring MEMS Gyroscope Based on Parametric Excitation

A54 problem in resonant MEMS gyroscope and indeed MEMS in general is the existence of parasitic capacitance between drive and sense electrodes, this parasitic capacitance results in electrical feed-through of the drive signal that thus limits the sensitivity of gyroscope. Hence, a novel excitation method employing both harmonic forcing and parametric excitation is applied to a resonant MEMS gyroscope. Parametric excitation can adjust the stiffness of the gyroscope; it is show that, by adjusting the parametric excitation parameters (frequency, amplitude and phase) of an electrostatically actuated and sensed device, electrical feed-through may be significantly reduced in a controllable manner.