MEMS Scanner-Based Biaxial LiDAR System for Direct Detection of Three-Dimensional Images

Herein, we developed a miniaturized LiDAR system using a MEMS scanner. The developed LiDAR system was evaluated by scanning the target 2.7 m away from the center of the MEMS mirror. The LiDAR image with a resolution of 125×50 pixels was acquired with 0.8 mrad and 2.2 mrad horizontal and vertical angular resolutions, respectively.