Electron Transparent Anode for MEMS Transmission Electron Microscope

This article describes one of the element of the miniature MEMS transmission electron microscope fully integrated on one chip, which is being developed at Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology. This element is electron gun equipped with transparent anode thin silicon nitride membrane. The importance of this electrode is explained and examples of the use of such electrode are presented. The technology and parameters of thin silicon nitride membranes are presented. Finally, we describe future works, concerning the electron transparent anode, which is crucial in fabricating the miniature MEMS TEM.